气相色谱-裂解炉联用分析硅氨烷高温裂解逸出气体

Gas Chromatographic Analysis of Gases in the Pyrolysis

以气相色谱与高温裂解炉联用，对用于制备Ｓｉ—Ｃ—Ｎ微粉的前体［ＳｉＣｘＮｙＨｚ］ｎ在Ａｒ气条件下高温裂解过程中所逸出的ＣＨ４、Ｈ２气体进行了分析。讨论了前体在Ａｒ气体中裂解时逸出气体浓度的变化和裂解时间、裂解温度对所逸出气体的影响以及Ｓｉ—Ｃ—Ｎ微粉中游离碳的影响。

The present paper describes the analysis of the gases evolved during the pyrolysis of silazane precursor with a combined gas chromatography/pyrolysis oven system. The effects of the pyrolysis time and pyrolysis temperature on the amount of CH4, H2 and free car-bon produced in the pyrolysis in argon were discussed.