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聚对二甲苯的制备及其应用研究进展 被引量:8

Research Advance in Preparation and Application of Poly(p-xylylene)
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摘要 聚对二甲苯是一种性能优异的涂层材料。文中主要对聚对二甲苯的制备方法、成膜机理、聚对二甲苯薄膜的性能及其应用领域进行了综述,指出其发展中存在的问题,并对其发展前景进行了展望。 Poly(p-xylylene) is a coating material with excellent performance. The preparation methods, mechanism of forming film, film properties and application fields of poly(p-xylylene) are reviewed. Moreover, the existing problems in development are pointed out and the development prospect is predicted.
作者 昝丽娜
出处 《化学推进剂与高分子材料》 CAS 2008年第5期22-25,共4页 Chemical Propellants & Polymeric Materials
关键词 聚对二甲苯 气相沉积 Gorham过程 应用 制备 poly(p-xylylene) vapor phase deposition Gorham process application preparation
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  • 1李志坚.微电子机械系统(MEMS)发展展望[J].电子科技导报,1997(1):2-9. 被引量:18
  • 2Bnnot A M. Synthesis of diamond thin film by hot-filamentassisted chemical vapor deposition. Thin Solid Film, 1990,185:111.
  • 3Lee S T,Lam Y W,Lin Zhangda,et al. Pressure effect on diamond nucleation in hot-filament CVD system. Phys Rev B, 1997,55(23) : 15937.
  • 4Matrumoto S, Sato Y, Kamo M. Vapor deposition of diamond particals methane. Jpn J Appl Phys, 1982, 21 (4):L183.
  • 5Moravec J T, Orent W T. Electron spectroscopy of ion beam and hydrocarbon plasma generated diamond carbon films. J Vac Sci Technol, 1981,18(2) : 226.
  • 6Gorham W F . US Pat,3342754. 1967.
  • 7Waters J F, Sutter J K, Meador M A. Addition curing thermosets endcapped with 4-amino [2,2] paracyclophane.J Polym Sci, Part A-1, 1991, 29:1917.
  • 8Lahann J, Klee D, Hooker H. Chemical vapour deposition polymerization of substituted [2, 2] paracyclophane.Macromol Rapid Commun, 1998,19 : 441.
  • 9Mark H, Bikales N, Overterger G,et al. Xylylene polymers. Enzyclopedia of Polym Sci Eng, 1985,17 : 991.
  • 10Yang G R, Ganguli S, Karcz J,et al. High deposition rate parylene films. J Crystal Growth, 1998,183:385.

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