多层压电陶瓷驻波超声微电机的研究

Research of Standing Wave Micromotor with Multilayer Piezoelectric Ceramic

主要研究了多层陶瓷双梁结构的超声驻波微电机。首先用有限元方法分析了该结构的振动模态，得到一适合电机运转的工作模式电机定子的固有扭转模态。定子扭转振动带动其上双梁产生弯曲振动。多层压电陶瓷产生纵向振动，从而构成纵、扭、弯复合超声电机。我们在计算的指导下设计并制作了一组微电机，电机直径３ｍｍ，定子高在４５ｍｍ之间，转子厚度为１ｍｍ，电机工作频率在５０８０ｋＨｚ，与计算结果基本符合。最后我们对电机的加工工艺，组装技术及结构设计进行了分析，指出了计算结果与实际工作状态存在差异的原因，并提出了改进的建议。

This paper deals with the standing wave micromotor with multilayer piezoelectric ceramic.First,the motor′s vibration modes were analyzed by finite element method(FEM) and a proper working mode was obtainedstator′s natural frequency of tortional vibration.The tortional vibration can cause the bending vibration of two beams on the stator.The longitudinal vibration was caused by a multilayer piezoelectric ceramic.Therefore a longitudinalbendingtorsional composite motor was constructed.Second,a series of micromotors were made at the instruction of the calculation.The diameters of motors are 3mm;the height of stators, 45mm;the thick of rotors, 1mm.The working frequencies of the motors are 5080kHz.This result is basically consistent with the calculation.Finally,the motor′s structure design,assemble engineering and fabrication technique were analyzed,the causes of the differences between the experiments and the calculation were point out and the suggestions of improving the motor′s performance were given.