柔性神经微电极阵列设计及微加工工艺研究

Key Design of Flexible Neural Microelectrode Arrays and Its Microfabrication Process

采用聚对二甲苯(parylene)作为基底,通过对柔性神经微电极阵列结构、引线排布、电极材料等进行优化选择和设计,并采用微机电加工工艺(MEMS),设计并研制出了2×8柔性神经微电极阵列,旨在为视网膜神经接口电极的研究开发奠定基础。

Microelectrode arrays （MEAs） are the key components in retinal implant for stimulating neural signals. A kind of flexible neural microelectrode arrays （MEAs） were developed on a new polymer, parylene which has an excellent performance. Some key theoretical questions for the fabrication of flexible M EAs were developed, accounting for electrode structure, lead wire and electrode material, etc. A Micro-Electro-Mechanical Systems （MEMS） process was introduced to fabricate the parylene-based MEAs.