等离子体增强化学气相沉积技术制备锗反蛋白石三维光子晶体(英文)

FABRICATION OF GERMANIUM INVERSE OPAL THREE DIMENSIONAL PHOTON CRYSTAL BY THE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION TECHNIQUES

采用溶剂蒸发对流自组装法将单分散二氧化硅(SiO2)微球组装形成三维有序胶体晶体模板,以锗烷(GeH4)为先驱体气用等离子增强化学气相沉积法在350℃填充高折射率材料锗,获得了锗反蛋白石光子晶体。通过扫描电镜、X射线衍射仪对锗反蛋白石的形貌、成分、结构进行了表征。结果表明:锗在SiO2微球空隙内填充均匀,得到的锗为多晶态。锗反蛋白石光子晶体为三维有序多孔结构。等离子体增强化学气相沉积的潜在优势在于可实现材料的低温填充,从而以高分子材料为模板进行复型,得到多种结构的三维光子晶体。

Monodisperse silica microspheres were assembled into a three-dimensional colloidal crystal template with long-range order by the solvent vaporization convection self-assembly method. Using GeH4 as the precursor gas, the plasma enhanced chemical vapor deposition method was then used to fill the voids of the silica colloidal crystal template with high refractive index germanium, and germanium inverse opal photonic crystal was obtained. The modality, components and structure of the resulting samples were characterized by scanning electron microscope and X-ray diffi＇action. The results show that germanium is homogeneously distributed inside the voids of the silica template. Its crystalline state is polycrystalline. Germanium inverse opal exhibits a three-dimensional ordered porous structure. The potential advantage of plasma enhanced chemical vapor deposition is that it can fill materials at lower temperature, so by this method, macromolecule materials can be used as templates, and thus, the three-dimensional photonic crystal with more kinds of structures can be obtained.