摘要
提出一种微米和毫微米量级线量的激光干涉式实时测量方法，分析了光路中应用直角双棱镜的作用和电路中消除振动影响的方法，列出的实测结果说明该方法是正确的。
A real time measuring method of laser interference in a scale of micron and millimicron is put forward.The effect of right angle double prism in the way of light beam is analyzed and so is the method of eliminating the influence of vibriation.The measured results listed in the paper show that the method is true.
出处
《青岛大学学报（工程技术版）》
CAS
1997年第4期83-86,共4页
Journal of Qingdao University(Engineering & Technology Edition)
关键词
微米
毫微米线量
激光干涉
测量
Laser interference,Displacement
Square prism
