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Surface oxidation of vanadium dioxide films prepared by radio frequency magnetron sputtering 被引量:2

Surface oxidation of vanadium dioxide films prepared by radio frequency magnetron sputtering
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摘要 This paper reports that the thermochromic vanadium dioxide films were deposited on various transparent substrates by radio frequency magnetron sputtering, and then aged under circumstance for years. Samples were characterized with several different techniques such as x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, when they were fresh from sputter chamber and aged after years, respectively, in order to determine their structure and composition. It finds that a small amount of sodium occurred on the surface of vanadium dioxide films, which was probably due to sodium ion diffusion from soda-lime glass when sputtering was performed at high substrate temperature. It also finds that aging for years significantly affected the nonstoichiometry of vanadium dioxide films, thus inducing much change in Raman modes. This paper reports that the thermochromic vanadium dioxide films were deposited on various transparent substrates by radio frequency magnetron sputtering, and then aged under circumstance for years. Samples were characterized with several different techniques such as x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, when they were fresh from sputter chamber and aged after years, respectively, in order to determine their structure and composition. It finds that a small amount of sodium occurred on the surface of vanadium dioxide films, which was probably due to sodium ion diffusion from soda-lime glass when sputtering was performed at high substrate temperature. It also finds that aging for years significantly affected the nonstoichiometry of vanadium dioxide films, thus inducing much change in Raman modes.
出处 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第9期3512-3515,共4页 中国物理B(英文版)
基金 supported by the National Natural Science Foundation of China (Grant No 60776039) China Agricultural University Foundation (Grant No 2007037)
关键词 surface oxidation vanadium dioxide FILMS magnetron sputtering surface oxidation, vanadium dioxide, films, magnetron sputtering
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参考文献16

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同被引文献39

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