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热蒸发YbF_3薄膜的机械特性 被引量：2

Mechanical properties of YbF_3 thin film deposited by thermal evaporation
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摘要 实验研究了热蒸发YbF3薄膜在大气中的应力和附着力。利用Veeco干涉仪,测试了各种工艺条件下单层YbF3薄膜的应力。结果发现:YbF3薄膜的残余应力为张应力,热应力在残余应力中的比重较大;沉积方式对薄膜应力的影响不大;薄膜应力在大气中有一个释放的过程。热处理后,YbF3薄膜应力增大。 The stress and adhesion of YbFa thin film deposited by thermal evaporation have been investigated. The stresses of singlelayer YbFa thin films at different technical conditions have been evaluated by using a Veeeo interferometer. In our experiment. residual stress of YbFa thin film is tensile. Thermal stress seems to be the main contribution to the residual stress. Deposition method affects the stress of thin film. The stress relaxation is observed in air. The stress of YbF3 thin film increases after heat treatment.
作者 张殷华 黄伟 张云洞
机构地区 中国科学院光电技术研究所
出处 《强激光与粒子束》 EI CAS CSCD 北大核心 2008年第8期1306-1308,共3页 High Power Laser and Particle Beams
基金 国家高技术发展计划项目
关键词 光学薄膜 YbF3薄膜 应力分析 附着力 热蒸发 Optical film YbF3 film Stress analysis Adhesion Thermal evaporation
分类号 O484.4 [理学—固体物理]
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参考文献8

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二级引证文献7

强激光与粒子束
2008年 第8期

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