摘要
针对MEMS陀螺由于机械耦合引起的正交误差,建立了包含误差的MEMS陀螺动力学方程,在开环检测和闭环检测情况下,分别对正交误差进行了分析,并通过相关检测技术抑制正交误差对陀螺性能的影响,提取出角速度信息。运用Simulink对陀螺进行了建模仿真,仿真结果表明:在开环检测和闭环检测情况下都能够有效消除正交误差的影响,由此验证了理论分析的正确性。
Aimed at quadrature error induced with mechanical coupling, the dynamic equations of MEMS gyroscopes including error are given, under the condition of open loop detection and closed loop detection quadrature error is analyzed separately. Effect of quadrature error on MEMS gyroscope performance is inhibited and the input angular rate signal is extracted by using the method of correlation detection. Simulink is used on the modeling and simulation of gyroscope, the simulation results show that the effect of quadrature error can be eliminated effectively under the condition of open loop detection and closed loop detection. Hence, the validity of the theoretical analysis is verified.
出处
《传感器与微系统》
CSCD
北大核心
2008年第9期82-84,88,共4页
Transducer and Microsystem Technologies
基金
国防科技预研基金资助项目(9140A090207)
