摘要
阐述了铁电薄膜材料的铁电、压电、热释电三个重要性质，和它们在微电子学和光电子学的应用，并展望了铁电薄膜未来发展前景。
?This article elaborates three important properties of ferroelectric thin film materials ferroelectric, piezoelectric and pyroelectric property, and their application in microelectronics and optoelectronics. It also shows the future of ferroelectric thin film.
出处
《化工新型材料》
CAS
CSCD
1997年第6期26-28,共3页
New Chemical Materials
关键词
铁电薄膜
性能
集成器件
铁电体
ferroelectric thin film, properties, application, integrated device
