六甲基二硅氮烷水解动力学研究

Study on Hydrolysis Kinetics of Hexamethyldisilazane

采用气相色谱仪分析的方法，考察了六甲基二硅氮烷在不同pH值、不同温度下的水解情况．结果表明，六甲基二硅氮烷的水解可按一级反应来描述，在pH=7-pH=13的范围内，随着pH值的增加，水解速率降低；在208～308K的范围内，温度对水解速率影响显著，温度升高，水解速率明显加快，pH=7时水解活化能为28．81kJ·mol^-1．

Hydrolysis kinetics of hexamethyldisilazane（HMDS）was studied through gas chromatogram at various pH values and temperatures. The results show that the kinetic process of HMDS can be described by the first -order reaction, the hydrolysis rate reduced with the rising pH value in the range of pH =7 to pH = 13. In addition, the higher temperature was helpful to the hydrolytic process between 208 K and 308 K, the hydrolysis rate increased with the rise of temperature , the activation energy of HMDS hydrolysis was 28.81 kJ ·mol^ - 1 when pH = 7.