Parylene C膜的热解特性

Thermal Decomposition of Parylene C Film

利用热重分析技术(TG/DTA)和热裂解-气相色谱/质谱联用测试分析技术(PY-GC/MS),对Parylene C膜的热分解性能和分解产物进行研究;通过X射线-光电子能谱(XPS)和红外光谱(IR)分析了ParyleneC膜的表面基本元素及其结构。实验结果表明,Parylene C膜在室温避光存放过程中已经自然氧化,氧化后的Parylene C膜受热分解首先是从被氧化的C-C键开始,生成苯甲醛或苯甲醇类氧化产物;随后是没有被氧化的C-C键断裂,生成一系列的单体及其裂解碎片。

The thermal decomposition of the parylene C film was studied by Thermal Gravimetric （TG/DTA） and Pyrolytic-Gas Chromatography-Mass Spectrometry （PY-GC/MS）. And the elements in the Parylene C film were detected by X-ray Photoelectron Spectroscope （XPS） and Infrared spectroscopy. The results show that the oxygenation of parylene C film can take place at the room temperature and in the nonluminous condition. The decomposition arises from the breaking up of oxygenated C-C bonds, and makes the products of phenyl-aldehyde or benzyl alcohol, which followed by the dissociation of the un-oxygenated C-C bonds, with the production of monomers and fragments.