摘要
通过磁控溅射法在纯钛表面溅射了一层ZrN涂层,研究了Ti/ZrN/瓷界面组织和力学性能。结果表明,Ti/瓷界面由富含Ti,Si,O元素的反应层和钛表面氧化层组成。钛表面溅射ZrN涂层后,Ti/瓷界面的连接转变为Ti/ZrN/瓷界面的连接,ZrN涂层能有效地防止钛表面生成过厚的氧化层。Ti/ZrN/瓷结合强度为29.2MPa,与Ti/瓷结合强度23.5MPa相比,提高了24.3%。
A ZrN film was sputtered on polished titanium substrate using magnetron sputtering technique. The microstructure and property of Ti/Zr/porcelain interface were investigated. The results show that the interface between porcelain and titanium is composed of oxide layer formed on titanium and reaction zone which mainly contains Ti,Si and O. The joint of Ti/porcelain translates into Ti/Zr/ porcelain after the deposition of ZrN coating. The ZrN film can effectively prevent the formation of oxidation layer on titanium. The bonding strength of Ti/Zr/Porcelain is 29.2MPa, comparing with 23.5MPa of Ti/porcelain increased by 24.3%.
出处
《材料工程》
EI
CAS
CSCD
北大核心
2008年第9期40-43,47,共5页
Journal of Materials Engineering
基金
吉林省科技发展项目(20050511)
关键词
TI
ZRN
瓷
界面
结合强度
Ti
ZrN
porcelain
interface
bonding strength
