摘要
本文采用铝诱导表面织构方法,在浮法玻璃表面成功地制备了陷光结构:采用快速辐射加热法对蒸镀约200 nm厚Al膜的浮法玻璃基片进行了一定时间的热处理,然后分别经H3PO4和HF/HNO3的混合溶液腐蚀。借助扫描电镜(SEM)、紫外可见分光光度计研究了热处理和HF/HNO3混合溶液处理的时间对玻璃表面织构形貌及陷光特性的影响。实验发现,快速辐射加热法退火2 h,就可在玻璃表面形成较好的陷光织构,织构的特征尺寸较小时,陷光作用较好。
The light trapping aluminum-induced texture (AIT) was fabricated on floating glass substrates in two steps:first,the 200nm thick Al films were deposited by vacuum deposition,followed by optical thermal annealing at 650℃ for 2 to 5 hours,and then,the Al coated glass was chemically etched in solutions of H3PO4 and HF/HNO3 mixture,respectively, until high quality textures form on the substrate. The microstructures and optical properties of the glass texture were characterized with scanning electron microscopy (SEM) and conventional spectrometer. The results show that the fabrication conditions affect, to a varying degree, the texture formation. For example, rapid optical thermal annealing for two hours produces good light trapping textures.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2008年第5期389-393,共5页
Chinese Journal of Vacuum Science and Technology