Si微电容式加速度计动态参数的提取

Extraction of Dynamic Parameters on Capacitance Silicon Micro-Accelerometer

介绍了一种电容式微Si加速度计的基本结构以及静电激振法用于电容加速度计动态参数测试的基本原理。提出了在开环条件下,采用静电激振法对该类型电容加速度计动态参数测试的电路方案。通过分析获得了扫频特性曲线和阶跃响应曲线,得到了传感器的固有频率、阻尼比。试验结果表明,采用静电激振法得到的结果与传感器设计值比较接近。可以认为,开发的动态参数测试系统是快速且有效的。

The basic structure of the capacitive accelerometer and the basic principle of electro- static excitation were introduced, that used to determine the dynamic parameters of the micro-electromechanical system （MEMS） capacitance accelerometer A brief system with the electrostatic excitation under the open-loop condition was presented. The resonant frequency and damp ratio were obtained by analyzing the sweep frequency curve and step response curve of the sensor. The exprement results show that the dynamic parameters obtained by the electrostatic actuating vibration method are close to the design values of the sensor, and the system is fast and effective.