半导体生产废水处理及回用技术介绍

The Introduction of the Wastewater Treatment and Reuse Technique of Semiconductor Factory

半导体生产废水主要来自车间的镀槽、清洗水等,废水中含有的主要污染物有:Ag、Cu、Ni、COD、SS、CN、酸碱等。文章以东莞柏狮赛格精密电子有限公司产生的废水为例,介绍了半导体生产废水处理及回用技术,处理后出水各项指标均可稳定达到国家和广东省以及排放标准,废水利用率达到了50%。

Semiconductor wastewater mainly came from plating trough and washing water of the workshop, and etc. The major pollutants contained in the wastewater were Ag, Cu, Ni, COD, SS, CN, pH, and etc. Based on the wastewaterfrom dongguan Parkinson lion SEG Precision Electronics Co., Ltd., the paper introduced semiconductor production wastewater treatment and recycling technology. Every targets achieved national stability and the Guangdong Province and emission standards, and the wastewater utilization rate reached 50 %, after the treatment.