激光束偏转方向定位方法研究及应用

Precise location of laser beam center and its applications

提出一种高精度确定激光束中心位置的方法。该方法以激光衍射理论为基础，利用ＣＣＤ作为探测器，结合曲线拟合技术，使激光束在ＣＣＤ上定位精度达到光敏元尺度的１／１０。利用此方法检测棱镜顶角。

We use a area CCD to acquire the data of the beam profile of a He Ne laser.According to the data,we utilize the minimum square deviation to get the intensity profile curve,and define the peak point as the center of the laser beam.The accuracy of center location can be about 1μm.Then we employ the method to measure the prism angle and get the measurement precision up to 0.004°