如何制作具有预期刻蚀深度的光刻胶浮雕全息图

How to make a photoresist reliefhologram with expection groove depth

光刻胶浮雕全息图通常是作为复制模压全息图的母版，在复制过程中所转移的是全息沟纹信息，所复制的全息图的衍射效率决定于沟纹的深度，因此控制浮雕全息图的沟纹深度非常重要，本文通过测量光刻胶浮雕全息图的衍射光强来确定它具有的相位调制度，从而间接地找到了测量刻蚀深度的新方法，并利用它来指导拍摄有预期刻蚀深度的光刻胶浮雕全息图。

The holographic information transfered from photoresist master to replica is the relief groove depth.Many properties of the replica are related to groove depth of master,so it is important to control the groove depth of photoresist master.In this paper,a novel method is adopted to obtain the value of the phase modulation by measuring diffraction light intensity of the photoresist master.Since there is a certain relationship between groove depth and phase modulation,the groove depth can be obtained indirectly.