摘要
文中介绍X射线干涉仪在当前纳米测量技术中的重要意义，阐述了X射线干涉仪的基本原理，全面介绍了国外在该领域的研究现状，并利用He－Ne激光及三光栅系统对X射线干涉技术实现纳米测量进行了模拟实验研究，进一步论证了X射线干涉纳米测量技术的可行性。
The significance of X - ray interferometry in current nanometer measurement, the fundamental principle of X - ray interferometry and the current researching situation in this field in British, Japan, German, U. S.A are introduced,Furthmore, a simulated experiment done in China by using He - Ne laser and three optical gratings is also discussed in this paper. The experimental result demonstrates that the X - ray interferometry is feasible in realizing nanometer measurement.
出处
《红外与激光工程》
EI
CSCD
1997年第5期48-53,47,共7页
Infrared and Laser Engineering
关键词
X射线干涉仪
纳米测量
干涉仪
X-ray interferometer
Nanometer measurement
Interferometer
