微机械运动的光纤干涉测量

OPTICAL FIBER INTEFEROMETER MEASUREMENT OF MICRO MECHANICAL MOVEMENT

文中介绍一种无接触测量机械部件微运动情况的光纤Michelson干涉测量方法的原理、实验装置和实验结果。根据计算和实验研究，对应不同的样品反射率提出了两种不同的实验装置方案。该实验装置已初步在微电子机械系统的研究中发挥作用。

A novel optical un-destructive measurement of microdynamic system based on fiber Michelson interferometer is introduced. Two experimental schemes for samples of different facet reflectivity are presented through numerical analysis. The experimental result of testing the movement of PZT shows that the method is feasible and correct. The micro-vibration and frequency spectrum of Micro- Electro- Mechanical System (MEMS) parts measured by this method are also discribed.