摘要
介绍了CO2激光制导用大面积光伏碲镉汞四象限探测器的参数设计和工艺考虑,重点讨论了材料参数对器件主要性能参数的影响,得出p型衬底浓度的最佳选择范围为(0.5~1.5)×1016cm-3。研制结果表明,探测器的各项性能参数均达到了设计指标要求。
Parameter design and process considerations of large area photovoltaic HgCdTe quadrantal detector for CO 2 laser guidance were introduced.The influence of material parameters on the main performance and parameters of the device were discussed.The optimum range of the concentration in p type substrate is (0.5~1.5)×10 16 cm -3 .The performance of the detector meets the design specifications.
出处
《红外技术》
CSCD
北大核心
1997年第6期1-4,共4页
Infrared Technology