区域分裂法在提取多层介质中多导体三维复杂互连结构电磁参数中的应用

Domain Decomposition Method and Its Applications in Parameter Extraction of 3－D Complex Multilayered and Multiconduotor Interconnects

本文首次将区域分裂法（ＤＤＭ）用于多层介质中多导体三维复杂互连结构的电磁参数的提取，可以快速、准确地提取复杂互连结构的静态电容矩阵．由于区域分裂法能把大问题化为若干独立的小问题，不仅可以缩小计算规模，而且可以在该算法框架下灵活地组合各种三维互连结构，具有很强的灵活性．再充分利用集成电路结构分层的特点，对各个小问题采用最恰当的计算方法，从而可大大减少整体计算所需的时间和存储空间．文中给出的计算结果与Ａｎｓｏｆｔ软件的计算结果吻合得较好，而计算所需的时间和存储空间仅为Ａｎｓｏｆｔ的三维参数提取软件所需计算机资源的几十分之一．

In this paper,an efficient method known as Domain Decomposition Method(DDM)is first employed in parameter extraction of 3-D multilayered and multiconductor interconnects. The quasi-static capacitance matrix can be obtained quickly and exactly by using this method. Since DDM can separate a big problem into several small ones, not only is the problem size decreased, but also many different types of 3-D interconnects can be combined together in this algorithm flexibly. Then by choosing the best way to deal with each of small problems by taking full advantage of the characteristic of the stratified structure in integrated circuit, CPU time and physical memory are saved greatly. Compared with Ansoft's parameter extractor 3D, the results given in this paper are quite accurate, and computing time and space needed are tens times less than those used by Ansoft software.