摘要
阐述利用半导体激光的频率变化和波长变化测量干涉仪光程差的基本原理，探讨一种在长度的两个端点干涉测量长度的新方法，即端点干涉测长法的原理，推导这种方法测量长度的公式，指出这种方法区别于其它干涉测长方法的独特优点，最后讨论测量中的注意事项以及需要深入研究的问题。
The basic principle of a new method for the measurement of the length at two endpoints through the measurement of optical path difference by use of the frequency and wavelength variations is described in the paper.A new length interferometry,i.e.,endpoint length interferometry is investigated.Some formulae for the length measurement are derived.The unique advantages of the length interferometry are pointed out in the paper.Some important notices and other problems which should be further investigated in the measurement are discussed.
出处
《光电工程》
CAS
CSCD
1997年第4期1-5,共5页
Opto-Electronic Engineering
基金
中国科学院光电技术研究所微细加工光学技术国家重点实验室基金
关键词
激光干涉术
半导体激光器
光程差测量
长度测量
Laser interferometry,Semiconductor lasers,Optical path difference measurement,Length measurement,Frequency correlation.
