MEMS硅梁谐振式传感器的研究

Research of MEMS Silicon Cantilever Resonant Sensor

通过对硅梁谐振式传感器工作原理的研究,结合Intellisuite软件对硅微悬臂梁谐振器的振动特性进行了分析,设计了具有悬臂梁结构的电热激励/压阻拾振的谐振式传感器,这种传感器具有体积小、功耗低、灵敏度高、准数字信号输出、成本低、与集成电路工艺兼容等优点。对研究制作过程中的关键工艺——各向异性腐蚀技术,尤其是对低温下的腐蚀工艺进行了实验研究,采用高低温相结合的湿法腐蚀工艺制作了微悬臂梁结构,通过实验分析了利用新型有机薄膜对各向异性腐蚀过程中的MEMS器件金属电极的保护效果,为实际生产和设计提供了参考依据。

The operation principle of a silicon cantilever resonant sensor was researched, the vibrant characteristic was analysed with Intellisuite software and the cantilever structure was designed with the system of electro-thermal excitation and piezoresistive detection. It has many advantages, such as small size, low power, high sensitivity, quasi-digital signal output, low cost, compatible with integrated circuit technology, etc. Simultaneously, the anisotropic etch process is the key technology, the etch process under low temperature was researched mainly through experiments. The etch method to produce micro cantilever was provided which is combined by high and low temperatures. The experiment analysis of the protective effect of the new organic glue on the metal electrode of MEMS device during the anisotropic etch process was proposed. The reference is provided for practical production and design on the basic of these.