摘要
通过分析薄膜共振频率的影响因素,将一种具有正负磁致伸缩性能的复合薄膜应用到乙酸气体的检测中。在介绍该气体传感器检测原理的基础上,阐述了实验准备过程,并通过SEM图像和共振频率随时间的响应曲线比较了两种不同制备方法所得到的敏感层的优缺点,实验结果表明超磁致伸缩薄膜可适用于微气体传感器的研究。
Giant magnetostrictive film （GMF） is increasingly applied in the design of micro-sensor for its many virtues. One kind of composite film with positive and negative magnetostrictive character was prepared, which was applied in the detection of acetic acid after analyzing the effect factor of resonant frequency. The principle of GMF sensor was introduced, the preparation step of the experiment was explained, and two sensors with different preparation of sensitive layer were compared by SEM figure and response curve of resonate frequency vs. time. The experiment verified that GMF is suitable for the micro gas sensor.
出处
《装备制造技术》
2008年第9期44-46,共3页
Equipment Manufacturing Technology
基金
国家自然科学基金资助项目(50605005)
