基于二维图形学的MEMS节点单元识别算法研究

Research of MEMS Nodal Element Recognition Algorithm Based on 2D Graphics

设计了一种MEMS(Microelectronic mechanical system)器件节点单元自动识别的方法,介绍了如何根据工艺和版图信息实现识别的过程,对图形学相关算法进行了详细论述。结合节点单元特征提炼了各种单元的识别规则,并基于此规则实现了具体的识别流程。详细讨论了识别过程中用到的二维图形学相关理论、算法。最后以多种常用MEMS器件为例进行了节点单元类型识别,均获得了正确的结果。

A kind of nodal element auto-recognition method of MEMS device is presented. Based on the process flows and layout, the whole recognition procedure is introduced in detail, and some related algorithms are emphasized. After the basic types of nodal elements are analyzed, a series of nodal elements extraction rules are abstracted according to the characteristics of each nodal element, and a complete set of recognition flows are implemented next. At last some algorithms of 2D graphics used in extraction are illustrated in particular. Several common MEMS devices are utilized to test this extraction module, and all graphic output are correct.