高陡度精密光学非球面CAM系统

CAM system of high gradient precise optical aspheric surface

本文提出了采用计算机控制光学表面成型（ＣＣＯＳ）技术用于高陡度精密光学非球面成型的一种方法，并阐述了ＣＣＯＳ的工艺流程，设计了相应的ＣＡＭ系统。该系统具有五个运动自由度，通过使一个小磨盘作三维平动并同时摆动，旋转工件而使磨头能始终垂直于加工点表面，以利加工高陡度非球面。此系统的加工口径可达φ３００ｍｍ，相对孔径Ｆ＝１．５。

This paper presents a method of producing high gradient precise optical aspheric surface by CCOS technology. We have designed an auto surfacing CAM system with 5 degrees of freedom. During the polishing process, the computer can make the polishing pad to move in three dimensions and drive the workpiece to sway and turn around simultaneously to keep the pad in the normal direction of the surface of the workpiece. This system can produce the aspheric target lens φ300mm,F1.5. The automatic programming system and the post processing algorithm are also introduced.