微进给伺服机构的在线误差前馈补偿

Feedforward Compensation Control for On-line Errors of Microfeed Servo Mechanism

针对微进给伺服机构的基本特性，采用PID校正控制和前馈补偿控制。在此基础上，为进一步减小微进给伺服机构的跟踪误差．提出在线误差前债补偿控制方法。理论分析证明，该方法可以提高微进给伺服机构的控制精度而不影响系统的稳定性。实验结果表明，采用这种误差补偿方法，系统控制精度可以达到±3μm。

According to the basic characteristics of the microfeed servo mechanism, a PID controller with feedforward compensation is developed. In order to eliminate the tracking errors, an on - line error feedforward compensation algorithm is proposed. Theoretical analyses prove that tracking errors can be greatly decreased, while the stability of the system remains. Experimental results show that tracking errors can be limited in by using this method.