摘要
研究了有衬底影响的类金刚石碳（ＤＬＣ）膜硬度测定技术。采用Ｈ－Ｄ关系外推、Ｍｅｙｅｒ图计算及Ｊ¨ｏｎｓｓｏｎ－Ｈｏｇｍａｒｋ公式计算（考虑ＩＳＥ）等三种方法测定了ＤＬＣ膜的“真实”硬度。结果表明，由Ｍｅｙｅｒ图计算的薄膜硬度最可靠、简便。通过试验还发现ＤＬＣ膜有约１５％的弹性恢复，并认为ＤＬＣ膜的硬度测定采用克努普压头更为恰当。
The hardness measurement technology of DLC films allowing for the effects of the substrate has been studied in this paper. the true hardness of the films was measured via the three following techniques: extrapolation of the function H=f(D) , calculation from Meyer plot, and computation from J¨onesson Hogmark Formula with the indentation size effect. The result showed that calculation from Meyer plot was the simplest and most reliable technique. Through the experiments, it was also found that the deformed DLC films exhibit about 15% elastic recovery, and considered that Knoop indenter was more suitable for hardness measurement of DLC films.
出处
《机械科学与技术》
CSCD
北大核心
1997年第6期1063-1066,1070,共5页
Mechanical Science and Technology for Aerospace Engineering
关键词
DLC膜
压痕尺寸效应
薄膜
硬度
DLC films Composite hardness Indentation size effect
