摘要
概述了抛光α－Ａｌ２Ｏ３单晶的意义、介绍了用锡盘抛光α－Ａｌ２Ｏ３单晶的实验装置、描述了抛光实验过程、研究了抛光时间和抛光液酸碱度对工件表面粗糙度的影响。通过改变抛光时间及抛光液ｐＨ值，可使α－Ａｌ２Ｏ３单晶工件表面粗糙度优于０．４ｎｍｒｍｓ。
This paper is summary about the significance of polishing single crystal α Al 2O 3,introduces the machine and the experiment process of polishing single crystal α Al 2O 3 using tin lap,the influence of polishing time and pH value of polishing liquid to the surface roughness of workpieces,After polishing,the surface roughness is better than 0 4 nm rms.
出处
《光学精密工程》
EI
CAS
CSCD
1997年第5期69-72,共4页
Optics and Precision Engineering
基金
吉林省青年科学基金
