微工程的发展

Microengineering

微工程(microengineering)是一门技术科学,它专门研究采用微电子工艺技术设计、材料合成、微机械加工、贴装、总装和封装,制造纳米、微米和毫米尺寸的实体三维结构微小型传感器和致动器,并利用这项技术把传感器、致动器以及信号和数据处理器集成在同一块基片上,构成专用集成微仪器(application-specific integrated microinstruments.ASIM),进而构建复杂的微工程系统,或称集成微系统。

Microengineering developments are result from the microelectronics technology. Micro-electro-mechanical system(MEMS), application-specific integrated microinstruments(ASIMs) and integrated microsystem with the growth of microelectronics technology will produce far-reaching influence on the system technology.