摘要
本工作基于靶丸全球面测量的经纬迹线法,应用由原子力显微镜、精密回转气浮轴系及辅助转位轴系等组成的靶丸表面形貌测量系统,对直径0.34 mm的空心塑料靶丸表面进行了测量实验。实验选择了圆周9条经圆(间隔20°),每个经圆方向上纬圆间隔10μm,最大偏移20μm的方案,获取了靶丸全球面的经纬测量迹线,并对测量结果进行了模数-功率谱特征曲线和表面均方根粗糙度的分析。
Based on the longitude-latitude trace method, a measurement system was developed for the complete surface measurement of inertial confinement fusion target. It was consisted of reconstructed atomic force microscope （AFM） combined with the preci- sion rotating air bearing and assistant transform shaft. In order to measureahollowCH target with diameter of 0.34 mm, a complete coverage pattern was arranged to be latitude traces with 10 μm separation along nine longitude paths separated by 20° （maximal offset of the latitude is 20μm）. All of traces along the whole spherical surface were obtained experimentally. The sphere surface power spectrum versus mode number curve and the root mean square roughness （RMS） parameter were also calculated to evaluate the target characteristics.
出处
《原子能科学技术》
EI
CAS
CSCD
北大核心
2008年第9期833-836,共4页
Atomic Energy Science and Technology
关键词
激光聚变靶丸
原子力显微镜
全表面检测
经纬迹线法
功率谱
inertial confinement fusion target
atomic force microscope
complete surface measurement
longitude-latitude trace method
power spectrum
