超精密微机械制造技术研究进展

Development of Ultra-precision Micro-machining Technology

随着航空航天、国防工业、微电子工业、现代医学以及生物工程技术的发展,对精密三维微小零件(特征尺寸在微米级到毫米级)的需求日益迫切。其结构形状的特异化、零件材料的多样化、尺寸与表面质量的高精度化成为三维微小零件及其微型装置及设备的显著特征,在使用功能、材料特性、结构形状、可靠性等方面的要求也越来越高。本文着重对超精密微机械制造技术的内涵、国内外研究现状和发展动态进行整理和描述,并对超精密微机械制造技术的未来发展趋势进行总结,为我国未来的先进制造技术研究与计划制订提供参考。

High-accuracy miniature 3D parts are increasingly in demand for the developing hi-tech industries, such as aerospace, defense industry, micro-electronic industry, modem medicine, and biological engineering. The special struc- ture and shape, the various materials, the accurate dimension and surface finish are features of the miniature 3D parts and its component devices. The requirements become higher and higher for the application of miniature 3D parts, such as the utility functions, material characteristic, shape, structure and reliability, and so on. This article emphasizes on the mech- anism of Ultra-precision machining, the current research state and the dynamic development in domestic and abroad. De- velopment trend of the Ultra-precision machining is summarized, which can be a reference for the development revising of advanced manufacture technique.