0.1μm 尘埃粒子计数器光学传感器

The Optical Sensor in the Airbone Particle Counter for 0.1μm

本文分析了首台国产０１μｍ尘埃粒子计数器中光学传感器设计与研制中的关键技术问题。详细研究了半内腔激光器腔内杂散光的分布特征，结合旋转椭球面反射镜聚光系统的大立体角反射共轭成像弥散斑分布的计算结果，设计了具有高信噪比输出的大立体角矩形光敏区共轭成像空间滤波光阑系统。

The technical cruxes about the design of the optical sensor in the airborne particle counter for 0.1μm,first in China,are analysed,and the illumination source in this counter is a special He-Ne laser with an active cavity,in which the characteristics about the distribution of the stray light are also discussed in detail.With the help of the calculation of the astigmatism of the reflexive conjugate imaging in a large solid angle in the rota-ellipsoid reflector,a diaphragm system is designed.The experiments have proved that this system has a high signal-to-noise ratio for the reflexive conjugate imaging of the rectangl sensitive volume in the sensor in a large solid angle,and its sensitivity is completely in accordance with the related design standard.