摘要
采用磁控溅射法,在刀具材料为W18Cr4V高速钢的后刀面上镀制了NiCr/NiSi薄膜热电偶。传感器既能满足切削要求,同时又能够快速采集温度信号,并对其进行了静态和动态标定,实验范围内线性误差为0.56%,时间常数为12.7 ms,响应迅速,满足实验要求。最后用ANSYS对传感器的瞬态响应和温度场分布进行了有限元仿真,并通过实验进行了验证。
NiCr/NiSi thin-film thermocouple was developed on the flank of cutting tool, made of W18Cr4V, by means of the magnetron sputting. The sensor was required to be with rapid response as temperature changes. In the process of metal cutting, the thin-film sensor ean rapidly carry out acquisition of the temperature signal, static calibration and dynamic calibration were performed. In the experiment, the linear error was 0. 56% and the constant time was about 12.7 ms in conclusion. It is proved by experiment that the thin-film sensor meets the requirements. Dynamic respond curve of thin-film sensor and temperature gradient are simulated by analysis. The simulation results are extremely in agreement with those of the experiments above.
出处
《仪表技术与传感器》
CSCD
北大核心
2008年第9期15-17,共3页
Instrument Technique and Sensor
基金
国家自然科学基金资助项目(50475152
50675026)
辽宁省自然科学基金项目(20062143)
辽宁省教育厅高校科技计划项目(05L023)
关键词
薄膜热电偶
磁控溅射
瞬态切削温度
有限元
thin- film thermocouple
magnetron sputting
instantaneous cutting temperature
FEM
