摘要
从等倾干涉原理出发推导了标准干涉环直径D0的数学表达式和测量方法,并讨论D0在平晶平面度测量中的重要作用。结合实际的等倾干涉仪CCD成像系统,从理论上研究运用机器视觉技术测量D0变化进而探测空气层厚度细微变化(0.02μm)的可行性,并由此提出机器视觉运用于干涉计量领域应解决的通用性问题。
The article deduces mathematical expression and measuring method of standard ring diameter D0 of isoclinic interferometer is described and the significant role D0 plays in planeness measurement is discussed. Based on practical isoclinic interferometer with CCD imaging system, the feasibility of measuring small variation （0.02 μm） of air layer thickness through D0 is studiedtheoretically. Finally, general issues encountered in the application of machine vision technology to interferometry are put forward.
出处
《计量学报》
EI
CSCD
北大核心
2008年第4期305-308,共4页
Acta Metrologica Sinica
基金
国家质量监督检验检疫总局科技项目(2005QK73)
关键词
计量学
平晶
平面度
等倾干涉
标准干涉环
机器视觉
Metrology
Optical flat
Planeness
Isoclinic interferometry
Standard interference ring
Machine vision
