压电参数的光反馈干涉测量方法

Measurement of Piezoelectric Parameters Based on Self-mixing Interference

研究了光反馈自混合干涉现象,建立了干涉法测量形变的原理,从而提出了一种基于光反馈干涉效应测量压电应变常数的方法。设计了梯度迭代算法,由实验数据提取被测压电器件的应变量。用一种已知参数的压电器件对此方法进行了验证,测试结果与参照值误差不超过5%。光反馈干涉测试系统所需光学元器件少、结构紧凑,既能用于实验室也能用于工厂车间。

The effect of optical feedback self-mixing interference is studied, the principle for measuring strain is proposed, and then the measurement of piezoelectric parameters based on self-mixing interference is proposed and tested. The gradient arithmetic is used to extract the strain of piezoelectric components. To validate this approach , the piezoelectric constant of a kind of piezoelectric samples is estimated and compared with the constant provided by the manufacturer, the deviation is less than 5 %. This approach is very simple, compact and economical set-up compared with the conventional interferometry. It can be used in laboratory and factory.