钛薄膜阳极氧化制备纳米孔结构TiO_2

Fabrication of Nano-pore Array Structure TiO_2 by Anodizing of Titanium Film

采用物理气相沉积的方法,以导电玻璃为基材沉积金属Ti薄膜,并将其作为阳极,在1%HF溶液中恒压阳极氧化,制备了具有纳米孔阵列结构的TiO2薄膜。研究表明,形成的TiO2薄膜具有多孔结构,微孔均为贯穿孔,孔形基本为圆形,孔径均匀,孔径大约为50 nm。在15℃溶液中阳极氧化相同时间制备的TiO2氧化膜的厚度显著大于25℃溶液制备的氧化膜厚度。TiO2氧化膜的厚度随着阳极氧化时间的延长而增加。

TiO2 nano- pore array structure was prepared by anodizing of PVD titanium film in 1% HF solution. The researches show that the shape of the pore in TiO2 nano- pore film is circular and its distribution is uniform. The size of the pore is about 50 nm. Under the same anodizing time conditions, the thickness of TiO2 nano-pore film prepared at 15℃ 1% HF solution is thicker than that prepared at 25℃ 1% HF solution. The longer the anodizing time is, the thicker the TiO2 film is.