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无驱动结构硅微机械陀螺的信号处理 被引量:1

Signal process for the non-drive silicon micro-machined gyroscope
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摘要 由于无驱动结构硅微机械陀螺输出信号较为特殊,应用这种特殊陀螺存在较大难度,为解决这一问题,从无驱动结构硅微机械陀螺的信号分析出发,根据其信号的特征提出用加速度计信号反映载体自转信号为基准,并以其作为参考信号解调陀螺信号的处理方法。软件上采用峰值检测和相位比较解调的算法,利用单片机实现该算法。同时设计相应的外围硬件电路,最终得到了一个能实时解调出陀螺信号得出陀螺的偏航和俯仰角速度值的信号处理系统。该系统由于引进了加速度计波形被调制带来的误差,其精度有待进一步改善。 From the analysis for the signal of the non-drive silicon micro-machine gyroscope, the acceleration signal which reflects the carrier' s rotation information is used as the benchmark. Upon this reference, and the peak-value measurement algorithm and phase comparison algorithm,the signal of the gyroscope can be demodulated. The MSC1214Y3 is used to carry out this algorithm. At the same time the peripheral circuit is designed and finally the leeway and pitching angle velocity is obtained.
出处 《北京机械工业学院学报》 2008年第3期11-14,33,共5页 Journal of Beijing Institute of Machinery
基金 国家自然科学基金资助项目(60627001) 北京市传感器重点实验室开放课题(KM200710772016)
关键词 微机械陀螺 信号处理 AD采样 micro-machined gyroscope signal process AD sampling
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  • 1MAENAKA K, SHIOZAWA T. A study of silicon angular rate sensors using anisotropic etching technology[J]. Sensors and Actuators A, 1994,43:72-77.
  • 2MIZUNO J, NOTTMEYER K, CABUZ Cleopata ,et al. Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceration and angular rate [C]. Sweden The 8th International Confence on Solid-State Sensors and Actuators, and Eurosensors Stockholm,1995: 679-682.
  • 3MAENAKA K, FUJITA T, KONISHI Y, et al.Analysis of a highly sensitive silicon gyroscope with cantilever beam as vibrating mass [J]. Sensors and Actuatous, 1996,54: 568-573.
  • 4DEGANI O,Seter Dan J, SOCHER Eran, et al. Optimal design and noise consideration of micromachined vidrating rate gyroscope with modulated integrative differential optical sensing [J]. Journal of Microelectromechanical Systems, 1998,7 (3): 329-338.
  • 5Jorg R. Kaienburg, Ralf Schellin. A novel silicon surface micromachining angle sensor[J]. Sensors and Actuators, 1999, 71: 542-556.
  • 6Toshiyuki Tsuchiya, Yasuyuki Kageyama, Hirofumi Funadashi, et al. Vibrating gyroscope consisting of three layers of polysilion thin film [J]. Sensors and Actuators, 2000, 82:114-119.
  • 7Yoichi Mochida, Masaya Tamura, Kuniki Ohwada. A micromachined vidrating rate gyroscope with independent beams for the drive and detection modes[J]. Sensors and Actuators, 2000,80:170-178.
  • 8Zhihong Li, Zhenchuan Yang,Zhixiong Xiao, et al. A bulk micromachined vidratory lateral gyroscope fadricated with wafer bonding and deep trench etching[J].Sensors and Actuators, 2000,83: 24-29.
  • 9Mochija Y,Tamura M,Ohwada K.A micromachined vibrating rate gyroscope with independent beams for the drive and detection modes[J].Sensors and Actuators,2000,80:170~ 178
  • 10Li Zhihong,Yang Zhenchuan,Xiao Zhixiong,et al.A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching[J].Sensors and Actuators,2000,83:24 ~ 29

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