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国外MEMS继电器的发展 被引量：1

The Latest Developments of MEMS Relay in Foreign Countries
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摘要 介绍了国外MEMS继电器的最新发展情况。以静电MEMS开关、电磁MEMS开关、磁保持MEMS开关和热MEMS开关为例,描述了MEMS开关的结构和工作原理。特别对静电MEMS开关和磁保持MEMS开关,给出了有关的理论计算。给出了各种类型MEMS开关的比较。介绍了MEMS开关制造方法和射频性能,最后介绍了MEMS开关的应用前景。 This paper introduces the latest developments of MEMS relay in foreign countries. It takes as examples electrostatic MEMS switches, electromagnetic MEMS switches, and magnetic latching MEMS switches and explains their structures and operational principles. Especially, it advances related theoretical calculations for the latter two switches. It also puts forward the fabrication methods and RF performances of MEMS switches. Finally, it introduces the applications of MEMS switches.
作者 黄正
机构地区 中国电子科技集团公司第
出处 《中国电子科学研究院学报》 2008年第5期468-473,共6页 Journal of China Academy of Electronics and Information Technology
关键词 MEMS 继电器 开关 悬臂梁 射频 MEMS relays switches cantilever beam RF
分类号 TN63 [电子电信—电路与系统]
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参考文献11

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中国电子科学研究院学报
2008年 第5期

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