精密激光刻划机中的光学技术

Optics Technology on Precision Laser Scribing Machine

本文介绍的工作台用计算机结合光电编码器控制伺服电机驱动的精密激光刻划机，运用激光轴予偏置以适应非平面工件刻划，以激光或不同线密度改变刻线宽度，用微光点指示工位等光学技术，有效地提高了整机的高精度高质量刻划性能。

In this paper we describe a new high precision Iaser scribing machine. The platform of this nachine is driven by a servo motor controled with a photoelectric coder andcomputer. With a predetermined Iaser beam axis angI. to the normaI Iine of the workpieces surface It suits workof no-plane. workpieces. We can obtain scribing Iine of apparently differdnt thickness by changing the dot density without changing the defocusing. We design a tiny visible light tiny spot indicator to direct the workposition. The mschine Completes working of high precisionard high quality.