摘要
介绍了一种既高效透过红外光,同时又能有效屏蔽电磁干扰的金属网栅薄膜的基本原理和制备工艺。分析了网栅参数对其光学及电磁性能的影响,推导了金属网栅结构参数对雷达波屏蔽效率和透红外关系式。理论研究表明,金属网栅的周期选择在200~400μm之间,线宽不大于10μm,是较为理想的网栅参数。通过使用光刻和镀膜技术,在红外基片上制作线条宽度小于10μm,周期约350μm的金属网栅。
The principle and manufacture process of a film-taped metallic mesh, which is transparent for infrared and shield electromagnetic wave, were intrduced. The influence of the parameters of metallic mesh film on optical and electromagnetic features was analyzed, and the relational expression between transparent metallic mesh structural parameters and radar wave-shielding efficiency, infrared transmittance were deduced . Theoretical research proves that if the metallic mesh's period is in 200 -400 μm,as well as line width is less than 10 μm, these characteristic parameters will be ideal. By using the photolithograph and coating technology , the metal mesh film on IR substrate is made , the line width of metallic mesh is less than 10 μm and the period is about 350 μm.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2008年第5期1162-1165,共4页
Journal of Synthetic Crystals
关键词
雷达波隐身
红外窗口
金属网栅
导电薄膜
radar stealth
infrared window
metallic mesh
conducting thin films