摘要
介绍了一种结构紧凑的三维扫描系统，由计算机输入控制参数使步进电机带动三维样品台工作。各纸最大扫描行程25mm，最小扫描步距2μm，全程累计误差小于1μm，该系统已成功地应用于光热偏转无损检测。
A compact three-dimensional scanning set-up is described. The three-dimen-sional sample plate is motived by step motors which are controlled by a personal computer.The maximum scanning range of each dimension is 25mm and the minimum step length is 2 μm. The tolerances of whole scanning range are less than 1 μ . The set-up has been suc-cessfully applied in nondestructive detection by photothermal deflection spectroscopy (PTDS).
出处
《光学仪器》
1997年第6期9-13,共5页
Optical Instruments
基金
国家自然科学基金
关键词
三维扫描系统
无损检测
光热偏转光谱
Three-dimensional Scanning Set-up, Nondestructive Detection
