基于滑膜阻尼的间接连接型音叉式微机械陀螺

A Tuning Fork Microgyroscope with Indirect Connection and Slide-film Damping

以提高微机械陀螺性能为目的,设计了一种新颖的音叉振动式微机械陀螺。该陀螺的特征在于:驱动和检测模态都是面内的,主要的空气阻尼是滑膜阻尼,使系统具有较低的能量损失和较高的Q值;对称的音叉式结构使检测电容加倍,并且由于中间结构的采用,对于加工误差具有较好的健壮性;采用驱动和检测方向具有较大刚度比的近似U型梁,使机械耦合大大降低。动力学分析的结果表明,该陀螺具有较高的稳定性和灵敏度。这不仅为获得高性能微机械陀螺提供了一种可行的设计方案,同时也为其它MEMS产品的设计提供了重要的参考价值。

A novel in-plane tuning fork microgyroscope with indirect connection and slide-film damping in the drive and sense directions is presented in the study, focusing on the investigations of the performance of the microgyroscope. The drive and sense mode are all inplane, and the dominant air damping is shde-film damping, which makes feasible to reduce energy loss of the system. The symmetric tuning fork structure can enable the sense capacitance doubling, and can gain robustness to fabrication imperfection due to the indirect connection structure. Moreover, the mechanical coupling is reduced by applying the approximately U-shaped suspension with large axial stiffness ratio between the drive and sense direction. The dynamical results show that vibratory gyroscopes have high stability and sensitivity. It not only provides a feasible design scheme to gain high performance gyroscope, but also has an important reference for the design of other MEMS products.