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基于SECS标准的半导体封装设备串口通信实现 被引量:2

Semiconductor packaging equipment serial communication based on SECS
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摘要 SECS标准用来统一各个生产设备之间以及生产设备和控制设备之间的通讯。介绍了SECS标准的构成,提出了使用SECS标准接口解决半导体封装设备通信的问题,使所有设备全部都通过使用SECS标准接口连接到单元控制器及更高级别的MES和工厂计划信息系统。使设备能快速地整合在CIM的管理系统中。系统实现了基于SECS标准的串口通信,并给出了基于SECS协议的串口通信的实例。 SECS standard was developed to standlize the communication between equipment and controller. This paper introduces the structure of SECS standard. Presenting a solution based on SECS standard interface, and the issues of the semiconductor packaging equipment communication was solved. All equipments are linked to cell controller, MES and factory planning information system by SECS standard interface. Equipment can be inte grated into CIM system rapidly. System implements the serial communication based on SECS standard. Providing the example of serial communication programming based on SECS protocol.
出处 《制造业自动化》 北大核心 2008年第10期83-85,120,共4页 Manufacturing Automation
关键词 半导体封装设备 半导体设备通信标准 串口通信 自动化 semiconductor packaging equipment SECS serial communication automation
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参考文献6

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