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SiO_2和ZrO_2薄膜光学性能的椭偏光谱测量 被引量:7

The Optical Properties of SiO_2 and ZrO_2 Films Investigated by Spectroscopic Ellipometry
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摘要 用溶胶-凝胶工艺在碱性催化条件下,采用旋转镀膜法在K9玻璃上分别制备了性能稳定的单层SiO2薄膜与单层ZrO2薄膜。用反射式椭圆偏振光谱仪测试了薄膜的椭偏参数,并用Cauchy模型对椭偏参数进行数据拟合,获得了溶胶-凝胶SiO2与ZrO2薄膜在300-800nm波段的色散关系。用紫外-可见分光光度计测量了薄膜的透射率,并与用椭偏仪换算出来的结果相比较;用原子力显微镜观察了薄膜的表面微结构。并讨论表面微结构与薄膜光学常数之间的关系。分析结果表明,Cauchy模型能较好的描述溶胶-凝胶薄膜的光学性能,较详细的得到了薄膜的折射率,消光系数等光学常数随波长λ的变化规律;薄膜光学常数的大小与薄膜的微结构有关。 Monolayer SlOe and monolayer ZrO2 thin films were deposited on K9 glass by Sol-Gel spin-coating method from base catalyzed sols, respectively. Reflective spectroscopic ellipsometer was used to characterize ellipsometric data of the films, and the Cauchy model was used to fit the ellipsometric data. The dispersion of the SiO2 and ZrO2 thin films was presented well in fitting spectroscopic ellipsometric data in 300-800 nm waveband. The transmittance of SiOz and ZrO2 film was measured by UV-VIS spectrophotometer and the results was compared with the simulated results by spectroscopic ellipsometry. The atomic force microscopy (AFM) was used to observe the surface microstructure of films. And the relation between surface mierostructure and optical constant of films was discussed. The results showed that Cauchy model could describe optical properties of SiO2 and ZrO2 film very well and the variation rule of the optical constants (refractive index n, the extinction coefficient k) with wavelength was obtained; the film optical constants is correlative with film microstructure.
出处 《压电与声光》 CSCD 北大核心 2008年第6期747-750,共4页 Piezoelectrics & Acoustooptics
基金 国家"八六三"高技术基金资助项目(2004AA848040)
关键词 椭偏仪 溶胶-凝胶 光学常数 透射率 微结构 spectroscopic ellipometry Sol-Gel optical constant transmittance microstructure
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