利用VCSEL激光二极管在1.58μm波段对CO_2气体温度的测量

Temperature Measurement of CO_2 Gas VCSEL Diode Laser at 1.58μm

利用1．58μm处的VCSEL激光二极管对CO2气体的两条特征谱线进行扫描以实现气体温度的测量．介绍了利用可调谐激光光谱结合波长调制方法进行温度测量的基本原理，并讨论了相关的影响因素．在常压下的加热石英管中进行了实验，在温度为20～300℃时，计算值与热电偶信号的温差在35℃以内．通过对测量误差的分析，为实现单激光器同时测量气体温度与浓度提供参考．

Temperature measurement is realized by scanning two absorption lines of CO2 using VCSEL （ vertical cavity surface emitting laser） diode laser at 1.58 μm. The fundamental of temperature measurement by tunable diode laser absorption spectroscopy （TDLAS） combined with wavelength modulation technique is introduced here, and correlative factors are discussed. The experiment is carried out in a heated quartz tube at normal pressure. Within the temperature range of 20 to 300 ℃ , the difference between TDLAS and K-thermocouple is less than 35 ℃. The result analysis can be useful for the further research on simultaneous concentration and temperature measurement by a single diode laser.