电容式硅微加速度传感器的研究

Research in Capacitive Silicon Micro-Acceleration Sensor

本文分析了新型电容式加速度传感器，评价了其非线性；提出了将静电激振法用于该传感器的可能性，并给出了在静电力作用下可动系统（悬臂梁）弯曲的分析方法及临界电压的确定方法。

The paper studies a new capacitive acceleration sensor, comments on its nonlinearity. It also proposes the possibility of static excitation being applied to the sensor and the analysis methods in the bending of the movable system under the electrostatic forces and critical voltage are presented.