摘要
设计了测量氧化铝湿度传感器的湿度源装置,该装置由5个固体干燥剂湿度源单元组成。实验了露点9.3^-33.5;9.3^-65.2℃;-14.5^-65.2℃;-65.2^-14.5℃转换时的平衡时间特性,实验验证了湿度源单元的准确性。结果表明:露点-65.2^-14.5℃转换时的平衡时间小于2 min,固体干燥剂湿度源装置可满足氧化铝湿度传感器实验测量需要。
The equipment of humidity fountain of measuring alumina humidity sensor is designed, which is composed of five humidity fountain cells containing solid desiccant. Balance time characteristic is investigated from 9.3--33.5℃ DP;9.3--65.2 ℃ DP; -14.5--65.2℃ DP; -65.2 --14.5℃ DP, and the veracity of humidity cell is validated. The results show that it is less than 2 min from -65.2--14.5℃ DP. The humidity fountain equipment of solid desiccant can meet the experimental meeds of alumina humidity sensor.
出处
《传感器与微系统》
CSCD
北大核心
2008年第10期104-106,共3页
Transducer and Microsystem Technologies
关键词
湿度传感器
露点
干燥剂
湿度源
humidity sensor
dew point （DP）
desiccant
humidity fountain
