摘要
无衍射光束具有中心光斑直径小且传播距离远的特性,可应用于精密测量领域中的直线度误差测量,具有对准灵敏度高、测量位置连续等优点。无衍射光环栅状光斑中心的对准精度对直线度误差测量精度有决定性影响。提出一种无衍射光斑整体中心检测算法,它能利用整幅图像的全部数据来计算中心位置,实验证明该方法具有亚像素定中精度和强抗干扰能力。
As the transmission dis.tance, non-diffracting beam has a very small central spot diameter and a long fairly high measuring accuracy and continuous measurement can be expected when it is applied in straightness error measurement, to which the accuracy of center positioning of non-diffracting beam is crucial. A method of global center detection of non- diffracting beam, the total data of pattern are used in calculation, is proposed. Experiment results indicate this method has a subpixel sensitivity and high anti-interference ability.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2008年第5期770-773,共4页
Semiconductor Optoelectronics
基金
国家自然科学基金资助项目(30470489)
关键词
无衍射光斑
直线度误差测量
整体中心检测
non-diffracting spot
straightness error measurement
global center detection
